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用于传感应用的无化学气相沉积转移石墨烯

CVD transfer-free graphene for sensing applications.

作者信息

Schiattarella Chiara, Vollebregt Sten, Polichetti Tiziana, Alfano Brigida, Massera Ettore, Miglietta Maria Lucia, Di Francia Girolamo, Sarro Pasqualina Maria

机构信息

University of Naples "Federico II", Department of Physics "E. Pancini", Naples, Italy.

Delft University of Technology, Department of Microelectronics, Delft, The Netherlands.

出版信息

Beilstein J Nanotechnol. 2017 May 8;8:1015-1022. doi: 10.3762/bjnano.8.102. eCollection 2017.

Abstract

The sp carbon-based allotropes have been extensively exploited for the realization of gas sensors in the recent years because of their high conductivity and large specific surface area. A study on graphene that was synthetized by means of a novel transfer-free fabrication approach and is employed as sensing material is herein presented. Multilayer graphene was deposited by chemical vapour deposition (CVD) mediated by CMOS-compatible Mo. The utilized technique takes advantage of the absence of damage or contamination of the synthesized graphene, because there is no need for the transfer onto a substrate. Moreover, a proper pre-patterning of the Mo catalyst allows one to obtain graphene films with different shapes and dimensions. The sensing properties of the material have been investigated by exposing the devices to NO, NH and CO, which have been selected because they are well-known hazardous substances. The concentration ranges have been chosen according to the conventional monitoring of these gases. The measurements have been carried out in humid N environment, setting the flow rate at 500 sccm, the temperature at 25 °C and the relative humidity (RH) at 50%. An increase of the conductance response has been recorded upon exposure towards NO, whereas a decrease of the signal has been detected towards NH. The material appears totally insensitive towards CO. Finally, the sensing selectivity has been proven by evaluating and comparing the degree of adsorption and the interaction energies for NO and NH on graphene. The direct-growth approach for the synthesis of graphene opens a promising path towards diverse applicative scenarios, including the straightforward integration in electronic devices.

摘要

近年来,由于其高导电性和大比表面积,基于sp碳的同素异形体已被广泛用于实现气体传感器。本文介绍了一项关于通过新型无转移制造方法合成并用作传感材料的石墨烯的研究。多层石墨烯通过CMOS兼容的Mo介导的化学气相沉积(CVD)沉积。所采用的技术利用了合成的石墨烯没有损坏或污染的优点,因为无需转移到基板上。此外,对Mo催化剂进行适当的预图案化可以获得具有不同形状和尺寸的石墨烯薄膜。通过将器件暴露于NO、NH和CO来研究该材料的传感特性,选择这些气体是因为它们是众所周知的有害物质。浓度范围是根据这些气体的常规监测选择的。测量在潮湿的N环境中进行,将流速设置为500 sccm,温度设置为25°C,相对湿度(RH)设置为�0%。暴露于NO时记录到电导响应增加,而暴露于NH时检测到信号下降。该材料对CO完全不敏感。最后,通过评估和比较NO和NH在石墨烯上的吸附程度和相互作用能,证明了传感选择性。石墨烯合成的直接生长方法为包括直接集成到电子器件在内的各种应用场景开辟了一条有前途的道路。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb55/5433142/77e490749958/Beilstein_J_Nanotechnol-08-1015-g002.jpg

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