Laboratoire des Matériaux Semiconducteurs, École Polytechnique Fédérale de Lausanne , 1015 Lausanne, Switzerland.
St. Petersburg Academic University , Khlopina 8/3, 194021 St. Petersburg, Russia.
Nano Lett. 2017 Jul 12;17(7):4101-4108. doi: 10.1021/acs.nanolett.7b00842. Epub 2017 Jun 30.
Reproducible integration of III-V semiconductors on silicon can open new path toward CMOS compatible optoelectronics and novel design schemes in next generation solar cells. Ordered arrays of nanowires could accomplish this task, provided they are obtained in high yield and uniformity. In this work, we provide understanding on the physical factors affecting size uniformity in ordered GaAs arrays grown on silicon. We show that the length and diameter distributions in the initial stage of growth are not much influenced by the Poissonian fluctuation-induced broadening, but rather are determined by the long incubation stage. We also show that the size distributions are consistent with the double exponential shapes typical for macroscopic nucleation with a large critical length after which the nanowires grow irreversibly. The size uniformity is dramatically improved by increasing the As flux, suggesting a new path for obtaining highly uniform arrays of GaAs nanowires on silicon.
硅衬底上 III-V 族半导体的可重复集成为开发与 CMOS 兼容的光电技术以及下一代太阳能电池的新型设计方案开辟了新途径。纳米线有序阵列可以实现这一目标,只要它们以高产量和均一性获得。在这项工作中,我们提供了对影响硅上有序 GaAs 阵列尺寸均匀性的物理因素的理解。我们表明,在生长的初始阶段,长度和直径分布受泊松涨落诱导展宽的影响不大,而是由长的潜伏期决定的。我们还表明,尺寸分布与宏观成核的双指数形状一致,具有较大的临界长度,此后纳米线不可逆地生长。通过增加砷通量,尺寸均匀性得到显著改善,这为在硅上获得高度均匀的 GaAs 纳米线阵列提供了新途径。