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纳米结构等离子体 AlO/Au-AlO/AlO 超材料的制作与光学性能。

Fabrication and optical properties of nanostructured plasmonic AlO/Au-AlO/AlO metamaterials.

机构信息

Departamento de Física de la Materia Condensada and Instituto de Microscopía Electrónica y Materiales, Universidad de Cádiz, E-11510 Puerto Real, Cádiz, Spain.

出版信息

Nanotechnology. 2017 Aug 18;28(33):335704. doi: 10.1088/1361-6528/aa7b6c. Epub 2017 Jun 23.

Abstract

Discontinuous multilayer (DML) thin films, which consist of nano-granular metals (NGMs) embedded in a dielectric matrix, have attracted significant interest as engineered plasmonic metamaterials. In this study, a systematic layer-by-layer deposition of three-dimensional sub-wavelength periodic plasmonic DML structures via the radio frequency sputtering of a composite target has been reported. The overall optical response of the DML films composed of Au-AlO NGM homogenous layers, which are periodically sandwiched between two amorphous AlO layers, are studied using reflection spectroscopic ellipsometry and transmission spectroscopy techniques. By applying the analytical optical approaches based on multiple Gaussian oscillators, ambient DML sub-wavelength structures have been successfully modeled. As a result, the effects of the size and shape of the Au nanoparticles as well as of the surrounding and interfacial media on their localized surface plasmon resonance (LSPR) are elucidated, and the related films thickness and effective optical constants are determined. Interestingly, during the examination of resonance frequencies and dielectric functions, the obtained DML structures exhibit unusual characteristics that are different from those of their NGM constituents due to the electromagnetic interactions of the NGM layers with the LSPR, which represent metamaterial features.

摘要

由嵌入介电基质中的纳米颗粒金属 (NGM) 组成的非连续多层 (DML) 薄膜作为工程等离子体超材料引起了极大的兴趣。在这项研究中,通过射频溅射复合靶,系统地逐层沉积了三维亚波长周期性等离子体 DML 结构。使用反射谱椭圆偏振术和透射谱技术研究了由 Au-AlO NGM 均匀层组成的 DML 薄膜的整体光学响应,这些层周期性地夹在两个非晶 AlO 层之间。通过应用基于多个高斯振子的分析光学方法,成功地对环境 DML 亚波长结构进行了建模。结果,阐明了 Au 纳米颗粒的尺寸和形状以及周围和界面介质对其局域表面等离子体共振 (LSPR) 的影响,并确定了相关薄膜的厚度和有效光学常数。有趣的是,在检查共振频率和介电函数时,由于 NGM 层与 LSPR 的电磁相互作用,所获得的 DML 结构表现出异常特征,与 NGM 成分不同,这代表了超材料特征。

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