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基于缺陷光致发光映射的研究金属氧化物中电阻开关机制的无损方法。

A nondestructive approach to study resistive switching mechanism in metal oxide based on defect photoluminescence mapping.

机构信息

Institute of Microelectronics, Tsinghua University, Beijing, China.

出版信息

Nanoscale. 2017 Sep 21;9(36):13449-13456. doi: 10.1039/c7nr02023f.

Abstract

The mechanism of resistive switching in metal oxides is a widely studied topic with interest in both fundamental physics and the practical need to improve device characteristics for memory based applications. Various experimental approaches were employed to reveal the different aspects of resistive switching; however, there is still a debate on the switching mechanism due to the lack of nondestructive microscopic characterization tools to monitor the oxygen vacancies. In this study, a novel approach using photoluminescence (PL) mapping was developed to study switching dynamics in metal oxides. By monitoring the emission properties with a confocal PL system, information regarding the switching mechanism can be obtained. The nondestructive nature of this approach allowed us to make comparisons between different switching conditions and endurance cycles. SrTiO based switching devices were used in the study. The distribution of oxygen vacancies can be positioned by mapping the integrated intensity of oxygen vacancy emission on a transparent top electrode, and both interface switching and filament switching can be distinguished. Moreover, the endurance study revealed a sudden rise in the emission intensity correlated with the device failure, which indicates an abrupt increase in the localized density of oxygen vacancies that results in an irreversible set process for the conductive filament.

摘要

金属氧化物中的电阻开关机制是一个广泛研究的课题,既涉及基础物理,又涉及改善基于存储的应用设备特性的实际需求。各种实验方法被用来揭示电阻开关的不同方面;然而,由于缺乏非破坏性的微观特征工具来监测氧空位,因此对于开关机制仍存在争议。在这项研究中,采用了一种新的方法,即利用光致发光(PL)映射来研究金属氧化物中的开关动力学。通过使用共聚焦 PL 系统监测发射特性,可以获得有关开关机制的信息。这种方法的非破坏性允许我们在不同的开关条件和耐久性循环之间进行比较。在研究中使用了基于 SrTiO 的开关器件。通过在透明顶部电极上对氧空位发射的积分强度进行映射,可以定位氧空位的分布,并且可以区分界面开关和细丝开关。此外,耐久性研究揭示了与器件故障相关的发射强度的突然增加,这表明局部氧空位密度的突然增加导致了导电细丝的不可逆设定过程。

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