Department of Electrical Engineering and Computer Science, University of Michigan, MI 48109, USA.
Nanoscale. 2014 Jan 7;6(1):400-4. doi: 10.1039/c3nr05016e. Epub 2013 Nov 8.
Resistive random access memory (RRAM) devices (e.g."memristors") are widely believed to be a promising candidate for future memory and logic applications. Although excellent performance has been reported, the nature of resistance switching is still under extensive debate. In this study, we perform systematic investigation of the resistance switching mechanism in a TaOx based RRAM through detailed noise analysis, and show that the resistance switching from high-resistance to low-resistance is accompanied by a semiconductor-to-metal transition mediated by the accumulation of oxygen-vacancies in the conduction path. Specifically, pronounced random-telegraph noise (RTN) with values up to 25% was observed in the device high-resistance state (HRS) but not in the low-resistance state (LRS). Through time-domain and temperature dependent analysis, we show that the RTN effect shares the same origin as the resistive switching effects, and both can be traced to the (re)distribution of oxygen vacancies (VOs). From noise and transport analysis we further obtained the density of states and average distance of the VOs at different resistance states, and developed a unified model to explain the conduction in both the HRS and the LRS and account for the resistance switching effects in these devices. Significantly, it was found that even though the conduction channel area is larger in the HRS, during resistive switching a localized region gains significantly higher VO and dominates the conduction process. These findings reveal the complex dynamics involved during resistive switching and will help guide continued optimization in the design and operation of this important emerging device class.
阻变随机存取存储器(RRAM)器件(例如“忆阻器”)被广泛认为是未来存储和逻辑应用的有前途的候选者。尽管已经报道了优异的性能,但电阻开关的性质仍在广泛争论中。在这项研究中,我们通过详细的噪声分析对基于 TaOx 的 RRAM 的电阻开关机制进行了系统研究,并表明从高电阻到低电阻的电阻开关伴随着通过在导电路径中积累氧空位而发生的半导体到金属的转变。具体来说,在器件的高电阻状态(HRS)中观察到高达 25%的明显随机电报噪声(RTN),而在低电阻状态(LRS)中则没有。通过时域和温度相关分析,我们表明 RTN 效应与电阻开关效应具有相同的起源,并且两者都可以追溯到氧空位(VO)的(再)分布。从噪声和传输分析中,我们进一步获得了不同电阻状态下的态密度和 VO 的平均距离,并开发了一个统一的模型来解释 HRS 和 LRS 中的传导,并解释这些器件中的电阻开关效应。值得注意的是,即使在 HRS 中导电路径面积更大,在电阻开关过程中,一个局部区域会获得显著更高的 VO,并主导传导过程。这些发现揭示了电阻开关过程中涉及的复杂动态,并将有助于指导这种重要新兴器件类别的设计和操作的持续优化。