Wei Xiang, Li Bing, Chen Lei, Sun Lin, Xin Meiting, Liu Bingcai
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, China.
Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, Xi'an Technological University, Xi'an 710021, Shaanxi, China.
Rev Sci Instrum. 2017 Jun;88(6):065101. doi: 10.1063/1.4984123.
An improved mathematical model of aspherical in-position measurement calibration is proposed in this paper, including hardware and software methods. The hardware method is used in rough calibration, but it is not precise enough. Then, the software method is chosen to further reduce the error. Simulation experiments are performed to demonstrate the effectiveness of this improved approach. Lastly, the model is verified through the testing of a concave aspheric surface. The experiment results show that the measurement errors of mirror after data processing can be reduced about 2 μm.
本文提出了一种改进的非球面在位测量校准数学模型，包括硬件和软件方法。硬件方法用于粗校准，但不够精确。然后，选择软件方法进一步减小误差。进行了仿真实验以证明这种改进方法的有效性。最后，通过对凹非球面的测试对模型进行了验证。实验结果表明，数据处理后镜面的测量误差可降低约2μm。
