Tytko Darius, Choi Pyuck-Pa, Raabe Dierk
Max-Planck-Institut für Eisenforschung GmbH, Max-Planck Str. 1, 40237 Düsseldorf, Germany.
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 305-338 Republic of Korea.
Nano Converg. 2017;4(1):15. doi: 10.1186/s40580-017-0109-y. Epub 2017 Jun 27.
We report on the oxidation behavior of AlN/CrN multilayers at 900 °C, deposited by radio frequency magnetron sputtering. It is shown that oxidation in this system is controlled by diffusion of Cr towards the surface and formation of CrO. Cr diffusion is found to mainly occur along grain boundaries. Thus, coherent cubic AlN/CrN multilayer regions with coarse columnar grain structures are found to be oxidation resistant, whereas regions decomposed into hexagonal AlN/cubic CrN are prone to oxidation.
我们报道了通过射频磁控溅射沉积的AlN/CrN多层膜在900°C下的氧化行为。结果表明，该体系中的氧化过程由Cr向表面的扩散以及CrO的形成所控制。发现Cr扩散主要沿晶界发生。因此，具有粗大柱状晶粒结构的相干立方AlN/CrN多层区域具有抗氧化性，而分解为六方AlN/立方CrN的区域则易于氧化。
