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基于图案化 Ag 纳米线网络的高灵敏度可穿戴透明电容应变传感器。

Wearable and Transparent Capacitive Strain Sensor with High Sensitivity Based on Patterned Ag Nanowire Networks.

机构信息

Department of Materials Science and Engineering, Yonsei University , 50 Yonsei-ro, Seodaemun-gu, Seoul 120-749, Korea.

出版信息

ACS Appl Mater Interfaces. 2017 Aug 9;9(31):26407-26416. doi: 10.1021/acsami.7b06474. Epub 2017 Jul 31.

Abstract

In this study, a transparent and stretchable thin-film capacitive strain sensor based on patterned Ag nanowire networks (AgNWs) was successfully fabricated. The AgNWs were patterned using a capillary force lithography (CFL) method and were embedded onto the surface of the polydimethylsiloxane substrate. The strain (ε) sensitivity of the capacitive strain sensor was controlled and enhanced by patterning the AgNWs into electrodes with an interdigitated shape. The interdigitated capacitive strain sensor (ICSS) is expected to have -1.57 gauge factor (GF) at 30% ε by calculation, which is much higher than the sensitivity of typical parallel-plate-type capacitive strain sensors. Because of the interdigitated pattern of the electrodes, the GF of the ICSS was increased up to -2.0. The ICSS had no hysteresis behavior up to ε values of 15% and showed stable ε sensing performance during the repeated stretching test at ε values of 10% for 1000 cycles. Furthermore, there was no cross talk between ε and pressure sensing in the AgNW-based ICSS, which was found to be insensitive to externally applied pressure. The ICSS was then used to detect the finger and wrist muscle motions of the human body to simulate its application to large and small ε sensing.

摘要

在这项研究中,成功制备了一种基于图案化 Ag 纳米线网络(AgNWs)的透明可拉伸薄膜电容应变传感器。AgNWs 采用毛细作用力光刻(CFL)方法进行图案化,并嵌入到聚二甲基硅氧烷(PDMS)基底表面。通过将 AgNWs 图案化为叉指形状的电极,控制和增强了电容应变传感器的应变(ε)灵敏度。预计叉指式电容应变传感器(ICSS)在 30%ε时的应变系数(GF)为-1.57,通过计算,这比典型的平行板式电容应变传感器的灵敏度高得多。由于电极的叉指图案,ICSS 的 GF 增加到-2.0。ICSS 在ε值高达 15%的情况下没有滞后行为,并且在 10%ε的重复拉伸测试中表现出稳定的ε传感性能,循环次数为 1000 次。此外,基于 AgNW 的 ICSS 中不存在ε和压力传感之间的串扰,发现其对外界施加的压力不敏感。然后,将 ICSS 用于检测人体手指和手腕肌肉运动,以模拟其在大、小ε传感中的应用。

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