Lee Brian S, Zhang Mian, Barbosa Felippe A S, Miller Steven A, Mohanty Aseema, St-Gelais Raphael, Lipson Michal
Opt Express. 2017 May 29;25(11):12109-12120. doi: 10.1364/OE.25.012109.
Suspended optical microresonators are promising devices for on-chip photonic applications such as radio-frequency oscillators, optical frequency combs, and sensors. Scaling up these devices demands the capability to tune the optical resonances in an integrated manner. Here, we design and experimentally demonstrate integrated on-chip thermo-optic tuning of suspended microresonators by utilizing suspended wire bridges and microheaters. We demonstrate the ability to tune the resonance of a suspended microresonator in silicon nitride platform by 9.7 GHz using 5.3 mW of heater power. The loaded optical quality factor (Q ~92,000) stays constant throughout the detuning. We demonstrate the efficacy of our approach by completely turning on and off the optical coupling between two evanescently coupled suspended microresonators.
悬浮光学微谐振器是用于片上光子应用的有前途的器件，如射频振荡器、光学频率梳和传感器。扩大这些器件的规模需要以集成方式调谐光学谐振的能力。在这里，我们通过利用悬浮线桥和微加热器，设计并通过实验证明了悬浮微谐振器的集成片上热光调谐。我们展示了使用5.3毫瓦的加热器功率，能够在氮化硅平台中将悬浮微谐振器的谐振调谐9.7吉赫兹。在整个失谐过程中，加载的光学品质因数（Q约为92,000）保持不变。我们通过完全打开和关闭两个倏逝耦合的悬浮微谐振器之间的光耦合，证明了我们方法的有效性。
