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作为液体环境中超小质量传感器的压电微悬臂梁的振动响应

Vibration response of piezoelectric microcantilever as ultrasmall mass sensor in liquid environment.

作者信息

Karimpour Masoud, Ghaderi Reza, Raeiszadeh Farhad

机构信息

Department of Mechanical Engineering, Faculty of Technical and Engineering, Shahrekord Branch, Islamic Azad University, Shahrekord, Iran.

Department of Mechanical Engineering, Faculty of Technical and Engineering, Shahrekord Branch, Islamic Azad University, Shahrekord, Iran.

出版信息

Micron. 2017 Oct;101:213-220. doi: 10.1016/j.micron.2017.07.009. Epub 2017 Jul 24.

DOI:10.1016/j.micron.2017.07.009
PMID:28825995
Abstract

The present study aims to analyze the vibrating behavior of a piezoelectric microcantilever (MC) as a mass nanosensor. The vibrating behavior of the MC as well as its sensitivity as a mass nanosensor are investigated and compared in both air and liquid environments. To this end, Euler-Bernoulli theory was used to model the vibrating behavior of piezoelectric MC with added mass at its free end. Frequency analysis was conducted by considering geometric discontinuities and taking added mass into account. The effect of liquid environment applied to the MC (as hydrodynamic forces) was based on a string of spheres model. Since changes in resonance frequency are used as the measurement parameter in mass sensors, changes in resonance frequency during absorption of nanoparticles was selected as the main parameter to be investigated in this study. Ultimately, with the aim to achieve optimal geometric dimensions for the piezoelectric MC, sensitivity analysis was additionally performed in order to increase the frequency sensitivity. According to the results, frequency sensitivity of the piezoelectric MC decreased in liquid environment compared to air environments. Moreover, increases in fluid density and viscosity caused a decreased frequency sensitivity. Simulation results indicate that the second vibrating mode in air and liquid environments is the appropriate operating mode for this type of MC.

摘要

本研究旨在分析作为质量纳米传感器的压电微悬臂梁(MC)的振动行为。在空气和液体环境中,对MC的振动行为及其作为质量纳米传感器的灵敏度进行了研究和比较。为此,采用欧拉 - 伯努利理论对自由端附加质量的压电MC的振动行为进行建模。通过考虑几何不连续性并计入附加质量进行频率分析。施加于MC的液体环境的影响(作为流体动力)基于一串球体模型。由于共振频率的变化被用作质量传感器的测量参数,因此在本研究中选择纳米颗粒吸附过程中共振频率的变化作为主要研究参数。最终,为了实现压电MC的最佳几何尺寸,还进行了灵敏度分析以提高频率灵敏度。结果表明,与空气环境相比,压电MC在液体环境中的频率灵敏度降低。此外,流体密度和粘度的增加导致频率灵敏度降低。模拟结果表明,在空气和液体环境中的第二振动模式是此类MC的合适工作模式。

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