Beijing National Laboratory for Condensed Matter and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, People's Republic of China. School of Physical Sciences, University of Chinese Academy of Sciences, People's Republic of China.
Nanotechnology. 2017 Oct 27;28(43):435701. doi: 10.1088/1361-6528/aa8842. Epub 2017 Aug 24.
Highly mobile 2-dimensional electron gases (2DEGs) at the (001), (011) and (111)-oriented LaAlO/SrTiO (LAO/STO) interfaces are obtained using spin coating chemical method, which is a gentle technique without plasma bombardment of the pulsed laser deposition. As revealed by x-ray diffraction spectrum and x-ray reflectivity analysis, the LAO over layer is epitaxially grown, and has a uniform thickness of ∼15 nm, ∼20 nm and ∼26 nm for (001), (011) and (111) orientations, respectively. The interfaces are well metallic down to 2 K. The carrier mobilities are ∼28 000 cm V s, ∼22 000 cm V s and ∼8300 cm V s at 2 K for the (001), (011) and (111) LAO/STO interfaces, respectively, and ∼8 cm V s, ∼4 cm V s and ∼4 cm V s at room temperature. The present work shows that the spin coating chemical method is a feasible approach to get high quality 2DEG at both the polar/non-polar and polar/polar interfaces.
采用旋涂化学法在（001）、（011）和（111）取向的 LaAlO/ SrTiO（LAO/STO）界面上获得了高度迁移的二维电子气（2DEG），这是一种温和的技术，没有使用脉冲激光沉积进行等离子体轰击。X 射线衍射光谱和 X 射线反射率分析表明，LAO 覆盖层外延生长，厚度均匀，（001）、（011）和（111）取向分别为约 15nm、20nm 和 26nm。界面在 2K 以下呈良好的金属性。在 2K 时，（001）、（011）和（111）LAO/STO 界面的载流子迁移率分别约为 28000cm V s、22000cm V s 和 8300cm V s，室温下分别约为 8cm V s、4cm V s 和 4cm V s。本工作表明，旋涂化学法是在极性/非极性和极性/极性界面上获得高质量 2DEG 的一种可行方法。
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