Kim Seonghwan, Kim Kyung Chun, Kihm Kenneth David
Department of Mechanical, Aerospace, and Biomedical Engineering, University of Tennessee, Knoxville, Tennessee, USA 37996.
School of Mechanical Engineering, MEMS/Nano Fabrication Center, Pusan National University, Busan 609-735, Korea.
Sensors (Basel). 2007 Dec 6;7(12):3156-3165. doi: 10.3390/s7123156.
A new concept using a near-field thermometry sensor is presented, employing atipless microcantilever experimentally validated for an aqueous medium within approximatelyone cantilever width from the solid interface. By correlating the thermal Brownian vibratingmotion of the microcantilever with the surrounding liquid temperature, the near-fieldmicroscale temperature distributions at the probing site are determined at separation distancesof z = 5, 10, 20, and 40 μm while the microheater temperature is maintained at 50°C, 70°C, or90°C. In addition, the near-field correction of the correlation is discussed to account for thequenched cantilever vibration frequencies, which are quenched due to the no-slip solid-wallinterference. Higher thermal sensitivity and spatial resolution is expected when the vibrationfrequencies increase with a relatively short and thick cantilever and the dimensions of themicrocantilever are reduced. Use of the microcantilever thermometry sensor can also reduce thecomplexity and mitigate the high cost associated with existing microfabricated thermocouplesor thermoresistive sensors.
本文提出了一种使用近场测温传感器的新概念，该传感器采用无尖端微悬臂梁，已通过实验验证其可用于距固体界面约一个悬臂梁宽度范围内的水性介质。通过将微悬臂梁的热布朗振动运动与周围液体温度相关联，在微加热器温度保持在50°C、70°C或90°C的情况下，确定了在z = 5、10、20和40μm的分离距离处探测部位的近场微尺度温度分布。此外，还讨论了相关性的近场校正，以考虑由于无滑移固体壁干扰而猝灭的悬臂梁振动频率。当振动频率随着相对短而厚的悬臂梁增加且微悬臂梁尺寸减小时，有望获得更高的热灵敏度和空间分辨率。使用微悬臂梁测温传感器还可以降低复杂性，并减轻与现有微制造热电偶或热阻传感器相关的高成本。
