Chiu Yung-Da, Wu Chao-Wei, Chiang Chia-Chin
Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, No. 415, Jiangong Rd., Sanmin Dist., Kaohsiung 807, Taiwan.
Department of Aeronautical and Mechanical Engineering, Air Force Academy, Kaohsiung 807, Taiwan.
Sensors (Basel). 2017 Sep 15;17(9):2129. doi: 10.3390/s17092129.
In this study, we propose a tilted fiber Bragg grating (TFBG) humidity sensor fabricated using the phase mask method to produce a TFBG that was then etched with five different diameters of 20, 35, 50, 55 and 60 μm, after which piezoelectric inkjet technology was used to coat the grating with graphene oxide. According to the experimental results, the diameter of 20 μm yielded the best sensitivity. In addition, the experimental results showed that the wavelength sensitivity was -0.01 nm/%RH and the linearity was 0.996. Furthermore, the measurement results showed that when the relative humidity was increased, the refractive index of the sensor was decreased, meaning that the TFBG cladding mode spectrum wavelength was shifted. Therefore, the proposed graphene oxide film TFBG humidity sensor has good potential to be an effective relative humidity monitor.
在本研究中，我们提出了一种采用相位掩膜法制造的倾斜光纤布拉格光栅（TFBG）湿度传感器，以制作出TFBG，然后用20、35、50、55和60μm这五种不同直径对其进行蚀刻，之后采用压电喷墨技术用氧化石墨烯涂覆光栅。根据实验结果，20μm的直径产生了最佳灵敏度。此外，实验结果表明波长灵敏度为-0.01nm/%RH，线性度为0.996。而且，测量结果表明当相对湿度增加时，传感器的折射率降低，这意味着TFBG包层模光谱波长发生了偏移。因此，所提出的氧化石墨烯薄膜TFBG湿度传感器具有成为有效相对湿度监测器的良好潜力。
