Graduate School of Technology, Industrial and Social Sciences, Tokushima University, 2-1 Minami-Josanjima, Tokushima, 770-8506, Japan.
Japan Science and Technology Agency (JST), ERATO Intelligent Optical Synthesizer (IOS) Project, 2-1 Minami-Josanjima, Tokushima, 770-8506, Japan.
Nat Commun. 2017 Sep 20;8(1):610. doi: 10.1038/s41467-017-00709-y.
Spectroscopic ellipsometry is a means of investigating optical and dielectric material responses. Conventional spectroscopic ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal instability, and polarization-wavelength dependency. We combine spectroscopic ellipsometry with dual-comb spectroscopy, namely, dual-comb spectroscopic ellipsometry. Dual-comb spectroscopic ellipsometry (DCSE). DCSE directly and simultaneously obtains the ellipsometric parameters of the amplitude ratio and phase difference between s-polarized and p-polarized light signals with ultra-high spectral resolution and no polarization modulation, beyond the conventional limit. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we construct a polarization-modulation-free DCSE system with a spectral resolution of up to 1.2 × 10 nm throughout the spectral range of 1514-1595 nm and achieved an accuracy of 38.4 nm and a precision of 3.3 nm in the measurement of thin-film samples.Spectroscopic ellipsometry is an established technique to characterize the optical properties of a material. Here, Minamikawa et al. combine the method with dual-comb spectroscopy, which allows them to obtain ellipsometric parameters including the phase difference between s-polarized and p-polarized light.
光谱椭圆偏振术是一种研究光学和介电材料响应的方法。传统的光谱椭圆偏振术在光谱精度、分辨率和测量时间之间存在权衡。由于其对机械振动噪声、热不稳定性和偏振波长依赖性的敏感性，偏振调制的性能较差。我们将光谱椭圆偏振术与双梳光谱学相结合，即双梳光谱椭圆偏振术。双梳光谱椭圆偏振术（DCSE）。DCSE 直接且同时以超高峰值分辨率和无需偏振调制获得 s 偏振光和 p 偏振光信号之间的幅度比和相位差的椭圆偏振参数，超出了传统极限。无需偏振调制的椭圆偏振评估还增强了系统的稳定性和鲁棒性。在这项研究中，我们构建了一个无偏振调制的 DCSE 系统，其光谱分辨率高达 1.2×10nm，在 1514-1595nm 的光谱范围内实现了高达 38.4nm 的精度和 3.3nm 的薄膜样品测量精度。光谱椭圆偏振术是一种用于表征材料光学性质的成熟技术。在这里，Minamikawa 等人将该方法与双梳光谱学相结合，从而使他们能够获得包括 s 偏振光和 p 偏振光之间的相位差在内的椭圆偏振参数。
