Lee Seung Woo, Choi Garam, Lee Sin Yong, Cho Yeongchan, Pahk Heui Jae
Appl Opt. 2021 Jan 1;60(1):67-74. doi: 10.1364/AO.410945.
We propose spectroscopic imaging ellipsometry that can measure spectral ellipsometric signals in the entire field of view simultaneously without areal scanning or operation of polarization devices. The proposed imaging ellipsometry is configured in a coaxial optical structure so that the high magnification objective lens is applicable and the spatial resolution is highly increased. Without the operation of polarization components and to efficiently obtain the spectral data in the object plane, the ellipsometric parameters are encoded into the high frequency in the spectral domain and are measured by an imaging Michelson interferometer. The volumetric thickness measurement by the proposed method was verified by comparing the thickness results of the SiO/Si sample that has four different thicknesses with commercial ellipsometer results.
我们提出了一种光谱成像椭偏仪，它可以在整个视场中同时测量光谱椭偏信号，而无需进行面扫描或操作偏振器件。所提出的成像椭偏仪采用同轴光学结构配置，因此可以应用高倍物镜并显著提高空间分辨率。无需操作偏振组件，为了在物平面上高效获取光谱数据，椭偏参数在光谱域中被编码到高频部分，并通过成像迈克尔逊干涉仪进行测量。通过将具有四种不同厚度的SiO/Si样品的厚度测量结果与商用椭偏仪的结果进行比较，验证了所提方法的体积厚度测量。
