Room-Temperature Activation of InGaZnO Thin-Film Transistors via He Irradiation.

Amorphous indium gallium zinc oxide (a-IGZO) is a transparent semiconductor which has demonstrated excellent electrical performance as thin-film transistors (TFTs). However, a high-temperature activation process is generally required which is incompatible for next-generation flexible electronic applications. In this work, He irradiation is demonstrated as an athermal activation process for a-IGZO TFTs. Controlling the He dose enables the tuning of charge density, and a dose of 1 × 10 He/cm induces a change in charge density of 2.3 × 10 cm. Time-dependent transport measurements and time-of-flight secondary ion mass spectroscopy (ToF-SIMS) indicate that the He-induced trapped charge is introduced because of preferential oxygen-vacancy generation. Scanning microwave impedance microscopy confirms that He irradiation improves the conductivity of the a-IGZO. For realization of a permanent activation, IGZO was exposed with a He dose of 5 × 10 He/cm and then aged 24 h to allow decay of the trapped oxide charge originating for electron-hole pair generation. The resultant shift in the charge density is primarily attributed to oxygen vacancies generated by He sputtering in the near-surface region.