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由定向银纳米线阵列介导的高效场效应迁移率非晶铟镓锌氧化物薄膜晶体管

Highly effective field-effect mobility amorphous InGaZnO TFT mediated by directional silver nanowire arrays.

作者信息

Liu Hung-Chuan, Lai Yi-Chun, Lai Chih-Chung, Wu Bing-Shu, Zan Hsiao-Wen, Yu Peichen, Chueh Yu-Lun, Tsai Chuang-Chuang

机构信息

Department of Photonics, Institute of Electro-Optical Engineering, National Chiao Tung University , Hsinchu 300, Taiwan.

出版信息

ACS Appl Mater Interfaces. 2015 Jan 14;7(1):232-40. doi: 10.1021/am5059316. Epub 2014 Dec 26.

Abstract

In this work, we demonstrate sputtered amorphous indium-gallium-zinc oxide thin-film transistors (a-IGZO TFTs) with a record high effective field-effect mobility of 174 cm(2)/V s by incorporating silver nanowire (AgNW) arrays to channel electron transport. Compared to the reference counterpart without nanowires, the over 5-fold enhancement in the effective field-effect mobility exhibits clear dependence on the orientation as well as the surface coverage ratio of silver nanowires. Detailed material and device analyses reveal that during the room-temperature IGZO sputtering indium and oxygen diffuse into the nanowire matrix while the nanowire morphology and good contact between IGZO and nanowires are maintained. The unchanged morphology and good interfacial contact lead to high mobility and air-ambient-stable characteristics up to 3 months. Neither hysteresis nor degraded bias stress reliability is observed. The proposed AgNW-mediated a-IGZO TFTs are promising for development of large-scale, flexible, transparent electronics.

摘要

在这项工作中,我们通过引入银纳米线(AgNW)阵列来促进沟道电子传输,展示了溅射非晶铟镓锌氧化物薄膜晶体管(a-IGZO TFTs),其有效场效应迁移率高达174 cm²/V s,创历史新高。与没有纳米线的参考器件相比,有效场效应迁移率提高了5倍以上,这明显依赖于银纳米线的取向以及表面覆盖率。详细的材料和器件分析表明,在室温IGZO溅射过程中,铟和氧扩散到纳米线基体中,同时保持了纳米线的形态以及IGZO与纳米线之间的良好接触。形态不变且界面接触良好,导致了高迁移率和长达3个月的空气环境稳定性。未观察到滞后现象或偏置应力可靠性下降。所提出的AgNW介导的a-IGZO TFTs在大规模、柔性、透明电子器件的开发方面具有广阔前景。

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