Center for Lighting Enabled Systems and Applications, Department of Materials Science and Engineering, Rensselaer Polytechnic Institute , 110 8th Street, Troy, New York 12180, United States.
ACS Appl Mater Interfaces. 2017 Oct 18;9(41):36385-36391. doi: 10.1021/acsami.7b09402. Epub 2017 Oct 3.
Transfer molding offers a low-cost approach to large-area fabrication of isolated structures in a variety of materials when recessed features of the open-faced mold are filled without leaving a residual layer on the plateaus of the mold. Considering both macroscale dewetting and microscale capillary flow, a proposed map of wetting regimes for blade meniscus coating provides a guide for achieving discontinuous dewetting at maximum throughput. Dependence of meniscus morphology on the azimuthal orientation of the stamp provides insight into the dominant mechanisms for discontinuous dewetting of one-dimensional (1-D) patterns. Critical meniscus velocity is measured and residual-layer-free filling is demonstrated for 1-D patterned soft molds (stamps) with periods ranging from 140 nm to 6 μm. Transfer of isolated lines, and multilayer woodpile structures were achieved through plasma bonding. These results are relevant to other roll-to-roll compatible processes for scalable production of high-resolution structures across large areas.
传递成型提供了一种低成本的方法，可以在各种材料中制造大面积的隔离结构，当开口模具的凹陷特征被填满而不在模具的高原上留下残留层时。考虑到宏观脱湿和微观毛细流动，提出的叶片弯月面涂层润湿状态图为实现最大吞吐量时的不连续脱湿提供了指导。压模的方位角对弯月面形态的依赖性提供了对一维（1-D）图案不连续脱湿的主要机制的深入了解。测量了临界弯月面速度，并演示了从 140nm 到 6μm 的一维图案软模具（压模）的无残留层填充。通过等离子键合实现了孤立线和多层木垛结构的转移。这些结果与其他适用于卷对卷的工艺相关，可在大面积上大规模生产高分辨率结构。
