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回音壁模式硅基锗光电探测器

Whispering gallery germanium-on-silicon photodetector.

作者信息

Su Zhan, Hosseini Ehsan Shah, Timurdogan Erman, Sun Jie, Moresco Michele, Leake Gerald, Adam Thomas N, Coolbaugh Douglas D, Watts Michael R

出版信息

Opt Lett. 2017 Aug 1;42(15):2878-2881. doi: 10.1364/OL.42.002878.

Abstract

We design and demonstrate, to the best of our knowledge, the first whispering gallery germanium-on-silicon photodetector with evanescent coupling from a silicon bus waveguide in a CMOS-compatible process. The small footprint (63.6  μm), high responsivity (∼1.04  A/W at 1530 nm), low bias voltage (-1  V), low dark current (2.03 nA), and large optoelectric bandwidth (32.9 GHz) of the detector enable simultaneous wavelength filtering and power detection, ideal for handling large network data traffic. In addition, with the resonant nature of the detector, we also optimize the design to enable long-wavelength detection, achieving a separate device with a detection range of up to 1630 nm with a >0.45  A/W responsivity, making it an important building block for optical communication networks.

摘要

据我们所知,我们设计并展示了首个采用与CMOS兼容工艺的硅基总线波导进行倏逝耦合的回音壁式硅基锗光电探测器。该探测器具有小尺寸(63.6μm)、高响应度(在1530nm处约为1.04A/W)、低偏置电压(-1V)、低暗电流(2.03nA)以及大光电带宽(32.9GHz)等特性,能够实现波长滤波和功率检测同步进行,非常适合处理大型网络数据流量。此外,利用探测器的谐振特性,我们还对设计进行了优化以实现长波长检测,制成了一款单独的器件,其检测范围可达1630nm,响应度>0.45A/W,使其成为光通信网络的重要组成部分。

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