微机电系统（MEMS）麦克风的压力互易校准
Pressure reciprocity calibration of a MEMS microphone.
作者信息
Wagner Randall P, Fick Steven E
机构信息
Engineering Physics Division, Physical Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899, USA
出版信息
J Acoust Soc Am. 2017 Sep;142(3):EL251. doi: 10.1121/1.5000326.
This article reports the first use of the pressure reciprocity technique to calibrate a micro-electromechanical system (MEMS) microphone. This standardized primary calibration method is conventionally used to calibrate laboratory standard microphones. Results for the pressure reciprocity calibration of a MEMS microphone and two laboratory standard microphones are presented for the frequency range 100-10 000 Hz. Because the amplifier in the MEMS microphone package prevents reciprocal operation, this microphone was used only as a receiver of sound. A description of the procedure is presented along with checks of the measurement results and data regarding the uncertainties of these results.
本文报道了首次使用压力互易技术校准微机电系统（MEMS）麦克风。这种标准化的原级校准方法传统上用于校准实验室标准麦克风。给出了100 - 10000 Hz频率范围内一个MEMS麦克风和两个实验室标准麦克风的压力互易校准结果。由于MEMS麦克风封装中的放大器妨碍互易操作，该麦克风仅用作声音接收器。文中介绍了校准过程，并对测量结果进行了检查，还给出了这些结果不确定度的数据。
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