Prato Andrea, Montali Nicola, Guglielmone Claudio, Schiavi Alessandro
Istituto Nazionale di Ricerca Metrologica (INRiM), Strada Delle Cacce, 91, 10135, Torino, Italy
J Acoust Soc Am. 2018 Oct;144(4):EL297. doi: 10.1121/1.5059333.
In the field of noise control and monitoring, a new generation of small and low-cost microelectro-mechanical system (MEMS) microphones is nowadays widely adopted. MEMS microphones, after recognition as traceable measurement instruments, could open up promising measurements based on wireless sensor networks. Current standards do not apply specifically to digital microphones. In this work, a pressure calibration procedure by comparison is carried out for a digital MEMS microphone and a sensitivity parameter suitable for metrological purposes is proposed. Measurement procedure and results between 20 Hz and 20 kHz are presented along with uncertainty contributions.
在噪声控制与监测领域，新一代小型低成本微机电系统（MEMS）麦克风如今被广泛采用。MEMS麦克风在被认定为可溯源测量仪器后，有望基于无线传感器网络开展有前景的测量。现行标准并不专门适用于数字麦克风。在这项工作中，对一款数字MEMS麦克风进行了比较压力校准程序，并提出了一个适用于计量目的的灵敏度参数。给出了20赫兹至20千赫兹之间的测量程序和结果以及不确定度贡献。
