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利用激光干涉光刻技术制备用于无标记检测的简化微纳流体装置。

Using Laser Interference Lithography in the Fabrication of a Simplified Micro- and Nanofluidic Device for Label-free Detection.

作者信息

Ajiri Taiga, Kasa Haruya, Maeki Masatoshi, Ishida Akihiko, Tani Hirofumi, Nishii Junji, Tokeshi Manabu

机构信息

Graduate School of Chemical Sciences and Engineering, Hokkaido University.

Research Institute for Electronic Science, Hokkaido University.

出版信息

Anal Sci. 2017;33(10):1197-1199. doi: 10.2116/analsci.33.1197.

DOI:10.2116/analsci.33.1197
PMID:28993597
Abstract

Recently, we developed a label-free detection method based on optical diffraction, and implemented it in on our fabricated micro- and nanofluidic device. This detection method is simple and useful for detecting biomolecules, but the device fabrication consists of complicated processes. In this paper, we propose a simple method for fabricating the micro- and nanofluidic device; the fabrication combines laser interference lithography with conventional photolithography. The performance of a device fabricated by the proposed method is comparable to the performance of the device in our previous study.

摘要

最近,我们开发了一种基于光学衍射的无标记检测方法,并在我们制造的微纳流体装置中实现了该方法。这种检测方法简单且对生物分子检测很有用,但装置制造过程复杂。在本文中,我们提出了一种制造微纳流体装置的简单方法;该制造方法将激光干涉光刻与传统光刻相结合。用所提方法制造的装置性能与我们先前研究中的装置性能相当。

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