Ashtiani Alireza Ousati, Jiang Hongrui
Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, WI 53706 USA.
Department of Electrical and Computer Engineering, the Department of Biomedical Engineering, the Department of Materials Science and Engineering, and the McPherson Eye Research Institute, University of Wisconsin-Madison, Madison, WI 53706 USA.
J Microelectromech Syst. 2017 Apr;26(2):305-307. doi: 10.1109/JMEMS.2017.2650406. Epub 2017 Jan 23.
We demonstrate an electrowetting-based liquid optical phase shifter. The phase shifter consists of two immiscible liquid layers with different refractive indices. Sandwiched between the two liquids is a rigid membrane that moves freely along the optical axis and supported by a compliant surround. When applied with a pressure, the thicknesses of both liquid layers change, which induces a difference in optical path, resulting in a phase shift. A miniaturized electrowetting-based actuator is used to produce hydraulic pressure. A multi-layered SU8 bonded structure was fabricated. A phase shift of 171° was observed when the device was incorporated in a Mach-Zehnder interferometer and driven with 100 V.
我们展示了一种基于电润湿的液体光学移相器。该移相器由两个具有不同折射率的不混溶液体层组成。夹在两种液体之间的是一个刚性膜，它可沿光轴自由移动并由柔性边框支撑。施加压力时，两个液体层的厚度都会改变，这会引起光程差，从而导致相移。使用小型化的基于电润湿的致动器来产生液压。制造了一种多层SU8键合结构。当该器件被集成到马赫-曾德尔干涉仪中并以100 V驱动时，观察到了171°的相移。
