Mi Xiaotao, Yu Haili, Yu Hongzhu, Zhang Shanwen, Li Xiaotian, Yao Xuefeng, Qi Xiangdong, Wan Qiuhua
Appl Opt. 2017 Jul 20;56(21):5857-5864. doi: 10.1364/AO.56.005857.
Groove error is one of the most important factors affecting grating quality and spectral performance. To reduce groove error, we propose a new ruling-tool carriage system based on aerostatic guideways. We design a new blank carriage system with double piezoelectric actuators. We also propose a completely closed-loop servo-control system with a new optical measurement system that can control the position of the diamond relative to the blank. To evaluate our proposed methods, we produced several gratings, including an echelle grating with 79 grooves/mm, a grating with 768 grooves/mm, and a high-density grating with 6000 grooves/mm. The results show that our methods effectively reduce groove error in ruled gratings.
刻槽误差是影响光栅质量和光谱性能的最重要因素之一。为了减少刻槽误差，我们提出了一种基于空气静压导轨的新型刻划刀具滑架系统。我们设计了一种带有双压电致动器的新型坯料滑架系统。我们还提出了一种完全闭环伺服控制系统，该系统带有一个新的光学测量系统，能够控制金刚石相对于坯料的位置。为了评估我们提出的方法，我们制作了几种光栅，包括每毫米79条刻槽的阶梯光栅、每毫米768条刻槽的光栅以及每毫米6000条刻槽的高密度光栅。结果表明，我们的方法有效地减少了刻划光栅中的刻槽误差。
