Shao Changfeng, Li Xinghui
Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Sensors (Basel). 2025 Mar 22;25(7):1990. doi: 10.3390/s25071990.
Large-size diffraction gratings have played an important role in modern scientific fields such as inertial confinement fusion, large-aperture astronomical telescopes, and high-precision immersion lithography machines with long-stroke displacement stages. However, due to the large size and high accuracy requirements of gratings, and considering the need for high efficiency and low cost, the fabrication of large gratings is extremely difficult. This paper reviews the fabrication technologies for large diffraction gratings, including grating tiling technology, grating ruling technology, single-exposure lithography, optical mosaic grating technology, and scanning beam interference lithography. It introduces the basic principles, representative research, and research progress of these technologies, analyzes their advantages and current problems, and provides reference for the development and optimization of the fabrication technologies of large diffraction gratings.
大尺寸衍射光栅在惯性约束聚变、大口径天文望远镜以及具有长行程位移台的高精度浸没式光刻机等现代科学领域发挥了重要作用。然而，由于光栅尺寸大且精度要求高，同时考虑到高效率和低成本的需求，大尺寸光栅的制造极具难度。本文综述了大尺寸衍射光栅的制造技术，包括光栅拼接技术、光栅刻划技术、单次曝光光刻、光学镶嵌光栅技术以及扫描光束干涉光刻。介绍了这些技术的基本原理、代表性研究及研究进展，分析了它们的优点和当前存在的问题，为大尺寸衍射光栅制造技术的发展与优化提供参考。
