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采用具有微升/分钟分辨率的低失调MEMS流量传感器精确测量气体体积。

Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution.

作者信息

Piotto Massimo, Del Cesta Simone, Bruschi Paolo

机构信息

IEIIT-PISA, CNR, Via G. Caruso 16, 56122 Pisa, Italy.

Department of Ingegneria dell'Informazione, University of Pisa, 56122 Pisa, Italy.

出版信息

Sensors (Basel). 2017 Oct 31;17(11):2497. doi: 10.3390/s17112497.

DOI:10.3390/s17112497
PMID:29088091
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5712980/
Abstract

Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volumes are described. The sensor is a single-chip platform, including several sensing structures and a low-offset, low-noise readout interface. A recently proposed offset compensation approach is implemented obtaining low temperature drift and excellent long time stability. The sensor is fabricated by applying a simple micromachining procedure to a chip produced using the BCD6s process of STMicroelectronics. Application of a gas conveyor allowed inclusion of the sensing structure into a channel of sub-millimeter cross-section. The results of measurements performed by making controlled air volumes pass through the sensor channel in both directions at rates from 0.1 to 5 mL/min are described.

摘要

描述了用于评估微机电系统（MEMS）热流量传感器在测量气体体积方面性能的实验。该传感器是一个单芯片平台，包括多个传感结构和一个低失调、低噪声的读出接口。采用了最近提出的失调补偿方法，实现了低温漂移和出色的长期稳定性。该传感器是通过对采用意法半导体（STMicroelectronics）BCD6s工艺生产的芯片应用简单的微加工工艺制造而成。使用气体输送装置可将传感结构纳入横截面为亚毫米级的通道中。描述了通过使受控空气体积以0.1至5毫升/分钟的速率在两个方向上通过传感器通道进行测量的结果。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/507913765723/sensors-17-02497-g013.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/727d2a2d4e92/sensors-17-02497-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/81d6d103ac62/sensors-17-02497-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/1d24a2e7274c/sensors-17-02497-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/d53f9c3f687c/sensors-17-02497-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/a044ed13c0f3/sensors-17-02497-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/6095496c6919/sensors-17-02497-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/507913765723/sensors-17-02497-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/05df1c84abf7/sensors-17-02497-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/fc16f040a0a1/sensors-17-02497-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/b0ed2dc49b69/sensors-17-02497-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/fb31dc18d7a4/sensors-17-02497-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/eb223da34d17/sensors-17-02497-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/1065d8867656/sensors-17-02497-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/727d2a2d4e92/sensors-17-02497-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/81d6d103ac62/sensors-17-02497-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/1d24a2e7274c/sensors-17-02497-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/d53f9c3f687c/sensors-17-02497-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/a044ed13c0f3/sensors-17-02497-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/6095496c6919/sensors-17-02497-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5dd7/5712980/507913765723/sensors-17-02497-g013.jpg

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本文引用的文献

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Minimum detectable air velocity by thermal flow sensors.热流量传感器的最小可检测空气速度。
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