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Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope.

作者信息

Zhang Yu, Tian Xiaobo, Liang Rongguang

出版信息

Opt Express. 2017 Oct 30;25(22):26554-26566. doi: 10.1364/OE.25.026554.

Abstract

To reduce the environmental errors, a snapshot phase-shifting interference microscope (SPSIM) has been developed for surface roughness measurement. However, fringe-print-through (FPT) error widely exists in the phase-shifting interferometry (PSI). To ensure the measurement accuracy, we analyze the sources which introduce the FPT error in the SPSIM. We also develop a FPT error correction algorithm which can be used in the different intensity distribution conditions. The simulation and experiment verify the correctness and feasibility of the FPT error correction algorithm.

摘要

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