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用于相移偏折术方法的稳健线性相移算法的理论与应用

Theory and application of robust linear phase-shift algorithm for phase-shift deflectometry method.

作者信息

Yang Song, Zhu Xianyong, Cao Zhirui, Zhao Jiali, Xiao Xiong, Lv Changchun, Du Yang, Wang Ruiqing, Wu Peng, Wang Zheyuan

机构信息

School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, Jilin, China.

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, Jilin, China.

出版信息

Sci Rep. 2024 Aug 8;14(1):18424. doi: 10.1038/s41598-024-69264-z.

Abstract

Based on the polynomial theory, the error propagation characteristics of the widely used N-step discrete Fourier transform (N-DFT) phase-shift algorithm were analyzed via theoretical analysis, under the effect of Gamma distortion and phase detuning. The results showed that the N-DFT algorithm could not simultaneously suppress both types of error. A robust linear phase-shift (RLPS) algorithm was designed, the performance of the RLPS and 8-DFT algorithms in terms of spectral response, detuning robustness, and was briefly analysis by Manuel Servin method. The Simulation analysis and comparison of the results show that the RLPS algorithm could suppress both types of error simultaneously, which exhibited better stability and accuracy than N-DFT and exponential algorithms, particularly in gradient measurement stability, peak-to-valley (PV) and root-mean-square (RMS) error suppression. Moreover, a physical experiment apparatus was built to test unidirectionally inclined plane mirror and concave mirror using the RLPS, N-DFT, and exponential algorithms. The results showed that the RLPS algorithm could significantly improve the measurement stability and accuracy in the presence of detuning and without screen Gamma calibration.

摘要

基于多项式理论,通过理论分析,在伽马失真和相位失谐的影响下,分析了广泛使用的N步离散傅里叶变换(N-DFT)相移算法的误差传播特性。结果表明,N-DFT算法不能同时抑制这两种类型的误差。设计了一种鲁棒线性相移(RLPS)算法,采用曼努埃尔·塞尔文方法简要分析了RLPS算法和8-DFT算法在光谱响应、失谐鲁棒性等方面的性能。结果的仿真分析和比较表明,RLPS算法可以同时抑制这两种类型的误差,与N-DFT算法和指数算法相比,它具有更好的稳定性和准确性,特别是在梯度测量稳定性、峰谷(PV)和均方根(RMS)误差抑制方面。此外,搭建了一个物理实验装置,使用RLPS算法、N-DFT算法和指数算法对单向倾斜平面镜和凹面镜进行测试。结果表明,在存在失谐且无需屏幕伽马校准的情况下,RLPS算法可以显著提高测量稳定性和准确性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1ae5/11310416/d6a7f855e661/41598_2024_69264_Fig1_HTML.jpg

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