Lin Jia-Yu, Zhong Kun-Da, Lee Po-Tsung
Opt Express. 2016 Mar 7;24(5):5125-5135. doi: 10.1364/OE.24.005125.
Aluminum-doped zinc oxide (AZO) is well known as transparent conducting material for electro-optical devices, but is rarely used as plasmonic material, particularly on the localized surface plasmon resonance (LSPR) behavior of AZO nanostructure and its plasmonic devices. In this study, we systematically investigate the plasmonic behaviors of AZO thin films and patterned AZO nanostructures with various structural dimensions under different annealing treatments. We find that AZO film can possess highly-tunable, metal-like, and low-loss plasmonic property and the LSPR characteristic of AZO nanostructure is observed in the near-infrared (NIR) region under proper annealing conditions. Finally, environmental index sensing is performed to demonstrate the capability of AZO nanostructure for optical sensing application. High index sensitivity of 873 nm per refractive index unit (RIU) variation is obtained in experiment.
掺铝氧化锌（AZO）作为用于电光器件的透明导电材料而广为人知，但很少用作等离子体材料，特别是关于AZO纳米结构及其等离子体器件的局域表面等离子体共振（LSPR）行为。在本研究中，我们系统地研究了不同退火处理下具有各种结构尺寸的AZO薄膜和图案化AZO纳米结构的等离子体行为。我们发现AZO薄膜可以具有高度可调谐、类似金属且低损耗的等离子体特性，并且在适当的退火条件下，在近红外（NIR）区域观察到了AZO纳米结构的LSPR特性。最后，进行了环境折射率传感以证明AZO纳米结构在光学传感应用中的能力。实验中获得了每折射率单位（RIU）变化873 nm的高折射率灵敏度。
