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在多模光纤结构上沉积的溅射掺铝氧化锌薄膜中的有损模式共振产生用于 1.55 µm 波长范围内的传感应用。

Lossy Mode Resonance Generation on Sputtered Aluminum-Doped Zinc Oxide Thin Films Deposited on Multimode Optical Fiber Structures for Sensing Applications in the 1.55 µm Wavelength Range.

机构信息

Faculty of Physics and Mathematics, Universidad Autónoma de Nuevo León, San Nicolás de los Garza 66455, Mexico.

CONACyT, Universidad Autónoma de Nuevo León, San Nicolás de los Garza 66455, Mexico.

出版信息

Sensors (Basel). 2019 Sep 27;19(19):4189. doi: 10.3390/s19194189.

Abstract

In this work, we demonstrated lossy mode resonance (LMR) generation in optical fiber structures based on multimode fibers coated with aluminum-doped zinc oxide (AZO) films. AZO thin films were deposited by using radio frequency magnetron sputtering. In order to exhibit the usefulness of the LMR effect for sensing applications in optical fiber based systems, the deposition conditions of the AZO film coatings were set to obtain the second LMR order within the 1.55 µm wavelength range. An optical transmission configuration setup was used to investigate the LMR effect on fiber structures based on the use of no-core and cladding-removed multimode fibers coated with AZO films synthesized from metallic sputtering targets with different proportions of Zn:Al, 92:8% and 98:2%, at atomic concentrations. The optical and electrical/chemical features of the AZO films were characterized with UV-vis and XPS spectroscopy, respectively. The optical response of the proposed sensing configuration to refractive index (RI) variations was experimentally demonstrated. For the best approach, the sensitivity of wavelength displacement to RI variations on the liquid surrounding media was found to be 1214.7 nm/RIU.

摘要

在这项工作中,我们展示了基于涂覆有掺铝氧化锌 (AZO) 薄膜的多模光纤的光纤结构中的有损模式共振 (LMR) 产生。AZO 薄膜是通过射频磁控溅射沉积的。为了展示 LMR 效应在光纤基系统中的传感应用中的有用性,将 AZO 薄膜涂层的沉积条件设置为在 1.55 µm 波长范围内获得二阶 LMR。使用光学传输配置设置来研究基于使用无芯和包层去除多模光纤的光纤结构中的 LMR 效应,这些光纤涂覆有 AZO 薄膜,是由具有不同 Zn:Al 原子浓度比的 92:8%和 98:2%的金属溅射靶合成的。AZO 薄膜的光学和电学/化学特性分别用紫外可见光谱和 XPS 光谱进行了表征。实验证明了所提出的传感配置对折射率 (RI) 变化的光学响应。对于最佳方法,发现波长位移对周围液体介质的 RI 变化的灵敏度为 1214.7nm/RIU。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5389/6806607/1fa6e2d22988/sensors-19-04189-g001.jpg

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