Esteves Josué, Rufer Libor, Ekeom Didace, Basrour Skandar
University Grenoble Alpes, CNRS, Grenoble INP, TIMA, 46 Avenue Félix Viallet, 38000, Grenoble, France.
Microsonics, 39 rue des Granges Galand, 37550, Sain-Avertin, France.
J Acoust Soc Am. 2017 Oct;142(4):2121. doi: 10.1121/1.5006905.
This work presents a lumped parameters equivalent model of condenser microphone based on analogies between acoustic, mechanical, fluidic, and electrical domains. Parameters of the model were determined mainly through analytical relations and/or finite element method (FEM) simulations. Special attention was paid to the air gap modeling and to the use of proper boundary condition. Corresponding lumped-parameters were obtained as results of FEM simulations. Because of its simplicity, the model allows a fast simulation and is readily usable for microphone design. This work shows the validation of the equivalent circuit on three real cases of capacitive microphones, including both traditional and Micro-Electro-Mechanical Systems structures. In all cases, it has been demonstrated that the sensitivity and other related data obtained from the equivalent circuit are in very good agreement with available measurement data.
这项工作基于声学、机械、流体和电学领域之间的类比，提出了一种电容式麦克风的集总参数等效模型。该模型的参数主要通过解析关系和/或有限元方法（FEM）模拟来确定。特别关注了气隙建模和适当边界条件的使用。通过有限元模拟得到了相应的集总参数。由于其简单性，该模型允许快速模拟，并且很容易用于麦克风设计。这项工作展示了在三个电容式麦克风实际案例中对等效电路的验证，包括传统结构和微机电系统结构。在所有案例中，已经证明从等效电路获得的灵敏度和其他相关数据与现有测量数据非常吻合。
