MEMS电容式麦克风综述。

Zawawi Siti Aisyah, Hamzah Azrul Azlan, Majlis Burhanuddin Yeop, Mohd-Yasin Faisal

Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia.

UiTM Foundation Centre, Universiti Teknologi Mara, Dengkil Campus, Dengkil, Selangor 43800, Malaysia.

Micromachines (Basel). 2020 May 8;11(5):484. doi: 10.3390/mi11050484.

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

本综述整理了约100篇关于开发微机电系统（MEMS）电容式麦克风的论文。据我们所知，这是学术界关于这种多功能器件在1989年至2019年间的首个全面存档。这些作品按照预期应用、制造方法、材料、尺寸和性能进行了列表。随后讨论了振膜、背板和腔体以及性能参数。本综述对那些对这种声学传感器的发展感兴趣的人有益。