Department of Materials Science and Engineering, National Taiwan University of Science and Technology, 43, Section 4, Keelung Road, Taipei 106, Taiwan.
Graduate Institute of Biomedical Optomechatronics, College of Biomedical Engineering, Taipei Medical University, Taipei 11031, Taiwan.
Biosens Bioelectron. 2018 Apr 15;102:129-135. doi: 10.1016/j.bios.2017.10.023. Epub 2017 Oct 18.
In this study, a photoresist template with well-defined contact hole array was fabricated, to which radio frequency magnetron sputtering process was then applied to deposit an alloyed ZrCuAlNi target, and finally resulted in ordered metallic glass nanotube (MGNT) arrays after removal of the photoresist template. The thickness of the MGNT walls increased from 98 to 126nm upon increasing the deposition time from 225 to 675s. The wall thickness of the MGNT arrays also increased while the dimensions of MGNT reduced under the same deposition condition. The MGNT could be filled with biomacromolecules to change the effective refractive index. The air fraction of the medium layer were evaluated through static water contact angle measurements and, thereby, the effective refractive indices the transverse magnetic (TM) and transverse electric (TE) polarized modes were calculated. A standard biotin-streptavidin affinity model was tested using the MGNT arrays and the fundamental response of the system was investigated. Results show that filling the MGNT with streptavidin altered the effective refractive index of the layer, the angle of reflectance and color changes identified by an Lab* color space and color circle on an ab chromaticity diagram. The limit of detection (LOD) of the MGNT arrays for detection of streptavidin was estimated as 25nM, with a detection time of 10min. Thus, the MGNT arrays may be used as a versatile platform for high-sensitive label-free optical biosensing.
在这项研究中，制作了具有明确定义的接触孔阵列的光致抗蚀剂模板，然后对其应用射频磁控溅射工艺来沉积合金 ZrCuAlNi 靶材，最后在去除光致抗蚀剂模板后得到有序的金属玻璃纳米管 (MGNT) 阵列。通过将沉积时间从 225 秒增加到 675 秒，MGNT 壁的厚度从 98nm 增加到 126nm。在相同的沉积条件下，MGNT 阵列的壁厚度增加，而 MGNT 的尺寸减小。MGNT 可以填充生物大分子来改变有效折射率。通过静态水接触角测量评估介质层的空气分数，从而计算横向磁场 (TM) 和横向电场 (TE) 偏振模式的有效折射率。使用 MGNT 阵列测试了标准的生物素-链霉亲和素亲和力模型，并研究了系统的基本响应。结果表明，用链霉亲和素填充 MGNT 改变了层的有效折射率，通过 Lab颜色空间和 ab*色度图上的颜色圆识别出反射率角度和颜色变化。MGNT 阵列检测链霉亲和素的检测限 (LOD) 估计为 25nM，检测时间为 10 分钟。因此，MGNT 阵列可用作用于高灵敏度无标记光学生物传感的多功能平台。
