Singh Avneet, Sharma Anjali, Tomar Monika, Gupta Vinay
Department of Physics and Astrophysics, University of Delhi, Delhi-110007, India.
Nanotechnology. 2018 Feb 9;29(6):065502. doi: 10.1088/1361-6528/aa9bc0.
The present work is focused on the growth and modification of the columnar nanostructures of SnO using a glancing angle deposition (GLAD) assisted rf sputtering technique for low temperature detection of carbon monoxide (CO) gas. The GLAD angle and deposition pressure are optimized to tailor the grow of columnar nanostructures of SnO, which exhibit an enhanced gas sensing response of 1.50 × 10 towards 500 ppm of CO gas at a comparatively lower operating temperature of 110 °C. The enhanced sensing response at low operating temperature is related to the growth of nanoporous columnar structures of SnO thin film under the GLAD configuration, which results in an enhanced interaction of target CO gas molecules with the large surface area of sensing SnO thin film. The origin of the sensing mechanism supporting the observed response characteristics towards CO gas is identified and discussed in detail.
目前的工作重点是利用掠角沉积(GLAD)辅助射频溅射技术生长和修饰SnO柱状纳米结构,用于低温检测一氧化碳(CO)气体。优化了GLAD角度和沉积压力,以调整SnO柱状纳米结构的生长,在110°C的相对较低工作温度下,该结构对500 ppm的CO气体表现出1.50×10的增强气敏响应。低工作温度下增强的传感响应与GLAD配置下SnO薄膜纳米多孔柱状结构的生长有关,这导致目标CO气体分子与传感SnO薄膜的大表面积之间的相互作用增强。详细识别并讨论了支持观察到的对CO气体响应特性的传感机制的起源。