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基于压电驱动双轴柔性铰链和三个电容式传感器的具有高分辨率和可重复性的二维微/纳弧度角发生器

Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors.

作者信息

Tan Xinran, Zhu Fan, Wang Chao, Yu Yang, Shi Jian, Qi Xue, Yuan Feng, Tan Jiubin

机构信息

Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China.

出版信息

Sensors (Basel). 2017 Nov 19;17(11):2672. doi: 10.3390/s17112672.

DOI:10.3390/s17112672
PMID:29156595
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5713096/
Abstract

This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision microangle measurement is analyzed and compensated for; so as to achieve a high angle output resolution of 10 nrad (0.002 arcsec) and positioning repeatability of 120 nrad (0.024 arcsec) over a large angular range of ±4363 μrad (±900 arcsec) for the 2D-MNAG. The impact of each error component, together with the synthetic error of the 2D-MNAG after principal error compensation are determined using Monte Carlo simulation for further improvement of the 2D-MNAG.

摘要

本研究提出了一种二维微/纳弧度角发生器（2D-MNAG），它利用压电驱动的挠性铰链实现二维偏转，并使用三个电容式传感器进行输出角度监测和反馈控制，从而实现了高角位移分辨率和可重复性。分析并补偿了用于精密微角度测量的电容式传感器的主要误差；以便在2D-MNAG的±4363 μrad（±900 arcsec）的大角度范围内实现10 nrad（0.002 arcsec）的高角度输出分辨率和120 nrad（0.024 arcsec）的定位重复性。使用蒙特卡罗模拟确定每个误差分量的影响以及主要误差补偿后2D-MNAG的综合误差，以进一步改进2D-MNAG。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eb9b/5713096/7ec5203b9e40/sensors-17-02672-g012.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eb9b/5713096/be8fc494f3b9/sensors-17-02672-g008.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eb9b/5713096/7ec5203b9e40/sensors-17-02672-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eb9b/5713096/916ebea59510/sensors-17-02672-g0A1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eb9b/5713096/70f39d788dad/sensors-17-02672-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eb9b/5713096/be8fc494f3b9/sensors-17-02672-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eb9b/5713096/0babbc20cbef/sensors-17-02672-g009a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eb9b/5713096/f2f721e52225/sensors-17-02672-g010.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eb9b/5713096/7ec5203b9e40/sensors-17-02672-g012.jpg

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Sensors (Basel). 2018 Jul 7;18(7):2195. doi: 10.3390/s18072195.
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Sensors (Basel). 2016 Aug 16;16(8):1301. doi: 10.3390/s16081301.
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