Chao Calvin Yi-Ping, Tu Honyih, Wu Thomas Meng-Hsiu, Chou Kuo-Yu, Yeh Shang-Fu, Yin Chin, Lee Chih-Lin
Taiwan Semiconductor Manufacturing Company, Hsinchu Science Park, Hsinchu 300, Taiwan.
Sensors (Basel). 2017 Nov 23;17(12):2704. doi: 10.3390/s17122704.
A study of the random telegraph noise (RTN) of a 1.1 μm pitch, 8.3 Mpixel CMOS image sensor (CIS) fabricated in a 45 nm backside-illumination (BSI) technology is presented in this paper. A noise decomposition scheme is used to pinpoint the noise source. The long tail of the random noise (RN) distribution is directly linked to the RTN from the pixel source follower (SF). The full 8.3 Mpixels are classified into four categories according to the observed RTN histogram peaks. A theoretical formula describing the RTN as a function of the time difference between the two phases of the correlated double sampling (CDS) is derived and validated by measured data. An on-chip time constant extraction method is developed and applied to the RTN analysis. The effects of readout circuit bandwidth on the settling ratios of the RTN histograms are investigated and successfully accounted for in a simulation using a RTN behavior model.
本文介绍了一项对采用45纳米背照式(BSI)技术制造的1.1微米间距、830万像素互补金属氧化物半导体图像传感器(CIS)的随机电报噪声(RTN)的研究。采用一种噪声分解方案来确定噪声源。随机噪声(RN)分布的长尾直接与像素源极跟随器(SF)的RTN相关。根据观察到的RTN直方图峰值,将全部830万像素分为四类。推导了一个将RTN描述为相关双采样(CDS)两相之间时间差函数的理论公式,并通过测量数据进行了验证。开发了一种片上时间常数提取方法并将其应用于RTN分析。研究了读出电路带宽对RTN直方图稳定率的影响,并在使用RTN行为模型的模拟中成功地进行了解释。