ITO/PtRh:PtRh薄膜热电偶的制备及其热电特性
Preparation and Thermoelectric Characteristics of ITO/PtRh:PtRh Thin Film Thermocouple.
作者信息
Zhao Xiaohui, Wang Hongmin, Zhao Zixiang, Zhang Wanli, Jiang Hongchuan
机构信息
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, No.4, Section 2, North Jianshe Road, Chengdu, 610054, China.
出版信息
Nanoscale Res Lett. 2017 Dec 15;12(1):624. doi: 10.1186/s11671-017-2387-z.
Thin film thermocouples (TFTCs) can provide more precise in situ temperature measurement for aerospace propulsion systems without disturbance of gas flow and surface temperature distribution of the hot components. ITO/PtRh:PtRh TFTC with multilayer structure was deposited on alumina ceramic substrate by magnetron sputtering. After annealing, the TFTC was statically calibrated for multiple cycles with temperature up to 1000 °C. The TFTC with excellent stability and repeatability was realized for the negligible variation of EMF in different calibration cycles. It is believed that owing to oxygen diffusion barriers by the oxidation of top PtRh layer and Schottky barriers formed at the grain boundaries of ITO, the variation of the carrier concentration of ITO film is minimized. Meanwhile, the life time of TFTC is more than 30 h in harsh environment. This makes ITO/PtRh:PtRh TFTC a promising candidate for precise surface temperature measurement of hot components of aeroengines.
薄膜热电偶（TFTCs）可为航空航天推进系统提供更精确的原位温度测量，而不会干扰气流以及热部件的表面温度分布。采用多层结构的ITO/PtRh:PtRh薄膜热电偶通过磁控溅射沉积在氧化铝陶瓷基板上。退火后，对该薄膜热电偶在高达1000°C的温度下进行了多个周期的静态校准。由于不同校准周期中电动势的变化可忽略不计，实现了具有优异稳定性和重复性的薄膜热电偶。据信，由于顶部PtRh层氧化形成的氧扩散阻挡层以及在ITO晶界处形成的肖特基势垒，ITO薄膜载流子浓度的变化被最小化。同时，薄膜热电偶在恶劣环境下的寿命超过30小时。这使得ITO/PtRh:PtRh薄膜热电偶成为航空发动机热部件精确表面温度测量的有前途的候选者。
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