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基于丝网印刷技术的氧化铟锡/氧化铟薄膜热电偶热电特性优化

Optimization on thermoelectric characteristics of indium tin oxide/indium oxide thin film thermocouples based on screen printing technology.

作者信息

Tian Bian, Cheng Gong, Zhang Zhongkai, Liu Zhaojun, Zhang Bingfei, Liu Jiangjiang, Li Le, Fan Xu, Lei Jiaming, Zhao Libo, Shi Peng, Lin Qijing, Jiang Zhuangde

机构信息

State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

出版信息

Rev Sci Instrum. 2021 Oct 1;92(10):105001. doi: 10.1063/5.0057148.

DOI:10.1063/5.0057148
PMID:34717407
Abstract

In this work, indium tin oxide (ITO)/indium oxide (InO) thin film thermocouples (TFTCs) were prepared based on screen printing technology for high temperature measurement. With terpilenol as solvent, epoxy resin and polyether amine as binders and glass powders as additives, the ITO and InO slurries were printed onto the AlO substrate to form thermocouples. The effect on thermoelectric properties of the TFTCs with heat treatment and different contents of additives was investigated through microstructure observation and thermal cycle test. The static calibration experiment shows that the annealed TFTCs with 7.5 wt. % glass powders additives have the maximum Seebeck coefficient. The thermoelectric voltage output of the TFTCs can reach 126.5 mV at 1275 °C while the temperature difference is 1160 °C and the sensitivity of the TFTCs was 109.1 µV/°C. The drift rate of the TFTCs was 8.34 °C/h at a measuring time of 20 min at 1275 °C. The TFTCs prepared via screen printing technology with excellent thermoelectric properties and thermal stability are aimed to be a viable replacement for practical applications.

摘要

在本工作中,基于丝网印刷技术制备了氧化铟锡(ITO)/氧化铟(InO)薄膜热电偶(TFTC)用于高温测量。以萜品醇为溶剂,环氧树脂和聚醚胺为粘结剂,玻璃粉为添加剂,将ITO和InO浆料印刷在AlO衬底上形成热电偶。通过微观结构观察和热循环测试,研究了热处理和不同添加剂含量对TFTC热电性能的影响。静态校准实验表明,添加7.5 wt.%玻璃粉添加剂的退火TFTC具有最大的塞贝克系数。在1275°C、温差为1160°C时,TFTC的热电电压输出可达126.5 mV,灵敏度为109.1 µV/°C。在1275°C下测量20分钟时,TFTC的漂移率为8.34°C/h。通过丝网印刷技术制备的具有优异热电性能和热稳定性的TFTC旨在成为实际应用中的可行替代品。

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