Tian Bian, Liu Zhaojun, Wang Cunfeng, Liu Yan, Zhang Zhongkai, Lin Qijing, Jiang Zhuangde
State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Rev Sci Instrum. 2020 Apr 1;91(4):045004. doi: 10.1063/1.5143044.
Thin film thermocouples (TFTCs) are designed by finite element analysis and fabricated on the flexible substrate (polyimide) based on radio frequency magnetron sputtering technology, which can be used to measure the temperature of the curved surface. Various novel structures of TFTCs with several multi-junctions are designed to improve the stability and the reliability of measurement. The characteristics of its thermoelectric output are simulated by software. As the temperature range varies between 10 °C and 200 °C, the electromotive force behavior experiments show that the average Seebeck coefficient of the TFTCs can reach 25.8 µV/°C, the resolution of sensor is less than 0.1 °C, and the temperature drift is only 1.3%, 1.2%, 1.0% at 84 °C, 110 °C, and 142 °C, respectively. The maximum drift rate of TFTCs is 0.234 °C/min at 142 °C. The flexible TFTC temperature sensor shows great advantages in sensitivity, stability, reliability resolution, and measuring range.
薄膜热电偶（TFTCs）通过有限元分析进行设计，并基于射频磁控溅射技术在柔性基板（聚酰亚胺）上制造，可用于测量曲面温度。设计了具有多个多结的各种新型TFTCs结构，以提高测量的稳定性和可靠性。通过软件模拟其热电输出特性。当温度范围在10℃至200℃之间变化时，电动势行为实验表明，TFTCs的平均塞贝克系数可达25.8μV/℃，传感器分辨率小于0.1℃，在84℃、110℃和142℃时的温度漂移分别仅为1.3%、1.2%和1.0%。在142℃时，TFTCs的最大漂移率为0.234℃/分钟。柔性TFTC温度传感器在灵敏度、稳定性、可靠性分辨率和测量范围方面显示出巨大优势。
