Klimov Nikolai, Purdy Thomas, Ahmed Zeeshan
Joint Quantum Institute, University of Maryland, College Park, MD 20742.
Thermodynamic Metrology Group, Sensor Science Division, Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899.
Sens Actuators A Phys. 2018 Jan;2690:308-312. doi: 10.1016/j.sna.2017.11.055. Epub 2017 Dec 2.
Resistance thermometry provides a time-tested method for taking temperature measurements that has been painstakingly developed over the last century. However, fundamental limits to resistance-based approaches along with a desire to reduce the cost of sensor ownership and increase sensor stability has produced considerable interest in developing photonic temperature sensors. Here we demonstrate that silicon photonic crystal cavity-based thermometers can measure temperature with uncertainities of 175 mK ( = 1), where uncertainties are dominated by ageing effects originating from the hysteresis in the device packaging materials. Our results, a ≈ 4-fold improvement over recent developments, clearly demonstate the rapid progress of silicon photonic sensors in replacing legacy devices.
电阻测温法提供了一种经过时间考验的温度测量方法，该方法在过去一个世纪中经过了精心发展。然而，基于电阻的方法存在基本限制，同时人们希望降低传感器的拥有成本并提高传感器稳定性，这使得开发光子温度传感器引起了相当大的兴趣。在此，我们证明基于硅光子晶体腔的温度计能够以175 mK（= 1）的不确定度测量温度，其中不确定度主要由器件封装材料中的滞后所产生的老化效应主导。我们的结果比近期的进展有大约4倍的提升，清楚地证明了硅光子传感器在取代传统器件方面的快速进步。
