Wu Yumin, Cheng Haobo, Wen Yongfu
Appl Opt. 2018 Jan 1;57(1):112-118. doi: 10.1364/AO.57.000112.
To accurately measure ultrasmall rotation angles, a robust and effective method based on lensless digital holographic microscopy is proposed in this paper. The method combines holographic microscopy, solid geometry, and 3D measurement, including holographic measurement and angle measurement processes. We can calculate the 3D shape by the angular spectrum algorithm and the least-squares phase-unwrapping algorithm in the holographic process. According to the relationship between the surface shape and rotation angles, the real-time rotation angles can be calculated. To validate the feasibility and practicability of the proposed approach, numerical noise simulations and experiments were performed. The measurement precision of rotation angle can reach 0.5″ in the range of 1000″ in this paper's experiments. The holographic method has high measurement precision and good stability. In addition, the compact small volume has great potential in small-angle sensor applications.
为了精确测量超小旋转角度，本文提出了一种基于无透镜数字全息显微镜的稳健且有效的方法。该方法结合了全息显微镜、立体几何和三维测量，包括全息测量和角度测量过程。在全息过程中，我们可以通过角谱算法和最小二乘相位解包裹算法计算三维形状。根据表面形状与旋转角度之间的关系，可以计算出实时旋转角度。为了验证所提方法的可行性和实用性，进行了数值噪声模拟和实验。在本文的实验中，旋转角度的测量精度在1000″范围内可达0.5″。该全息方法具有高测量精度和良好的稳定性。此外，紧凑的小体积在小角度传感器应用中具有很大潜力。
