Zhang Enzheng, Hao Qun, Chen Benyong, Yan Liping, Liu Yanna
Opt Express. 2014 Oct 20;22(21):25587-98. doi: 10.1364/OE.22.025587.
A laser heterodyne interferometer for simultaneous measuring displacement and angle based on the Faraday effect is proposed. The optical configuration of the proposed interferometer is designed and the mathematic model for measuring displacement and angle is established. The influences of the translational, lateral and rotational movements of the measuring reflector on displacement and angle measurement are analyzed in detail. The experimental setup based on the proposed interferometer was constructed and a series of experiments of angle comparison and simultaneous measuring displacement and angle were performed to verify the feasibility of the proposed interferometer for precision displacement and angle measurement.
提出了一种基于法拉第效应的用于同时测量位移和角度的激光外差干涉仪。设计了该干涉仪的光学结构，并建立了测量位移和角度的数学模型。详细分析了测量反射镜的平移、横向和旋转运动对位移和角度测量的影响。构建了基于该干涉仪的实验装置，并进行了一系列角度比较以及同时测量位移和角度的实验，以验证所提出的干涉仪用于精密位移和角度测量的可行性。
