Lu Fei, Wang Haixing, Guo Yanjie, Tan Qiulin, Zhang Wendong, Xiong Jijun
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China.
Sensors (Basel). 2018 Jan 16;18(1):242. doi: 10.3390/s18010242.
A wireless and passive temperature sensor operating up to 800 °C is proposed. The sensor is based on microwave backscatter RFID (radio frequency identification) technology. A thin-film planar structure and simple working principle make the sensor easy to operate under high temperature. In this paper, the proposed high temperature sensor was designed, fabricated, and characterized. Here the 99% alumina ceramic with a dimension of 40 mm × 40 mm × 1 mm was prepared in micromechanics for fabrication of the sensor substrate. The metallization of the Au slot patch was realized in magnetron sputtering with a slot width of 2 mm and a slot length of 32 mm. The measured resonant frequency of the sensor at 25 °C is 2.31 GHz. It was concluded that the resonant frequency decreases with the increase in the temperature in range of 25-800 °C. It was shown that the average sensor sensitivity is 101.94 kHz/°C.
本文提出了一种工作温度高达800°C的无线无源温度传感器。该传感器基于微波反向散射射频识别（RFID）技术。薄膜平面结构和简单的工作原理使该传感器易于在高温下运行。本文对所提出的高温传感器进行了设计、制造和表征。这里采用微机械加工制备了尺寸为40mm×40mm×1mm的99%氧化铝陶瓷，用于制造传感器基板。采用磁控溅射实现了金槽贴片的金属化，槽宽为2mm，槽长为32mm。该传感器在25°C时的测量谐振频率为2.31GHz。得出结论：在25-800°C范围内，谐振频率随温度升高而降低。结果表明，该传感器的平均灵敏度为101.94kHz/°C。
