Kou Hairong, Yang Libo, Zhang Xiaoyong, Shang Zhenzhen, Shi Junbing, Wang Xiaoli
Department of Intelligence and Automation, Taiyuan University, Taiyuan 030032, China.
Jinxi Industries Group Co., Ltd., Taiyuan 030024, China.
Micromachines (Basel). 2022 Apr 15;13(4):621. doi: 10.3390/mi13040621.
A novel, wireless, passive substrate-integrated waveguide (SIW) temperature sensor based on a complementary split-ring resonator (CSRR) is presented for ultra-high-temperature applications. The temperature sensor model was established by using the software of HFSS (ANSYS, Canonsburg, PA, USA) to optimize the performance. This sensor can monitor temperature wirelessly using the microwave backscatter principle, which uses a robust high-temperature co-fired ceramic (HTCC) as the substrate for harsh environments. The results are experimentally verified by measuring the S (1,1) parameter of the interrogator antenna without contact. The resonant frequency of the sensor decreases with the increasing temperature using the dielectric perturbation method, which changes from 2.5808 to 2.35941 GHz as the temperature increases from 25 to 1200 °C. The sensitivity of the sensor is 126.74 kHz/°C in the range of 25-400 °C and 217.33 kHz/°C in the range of 400-1200 °C. The sensor described in this study has the advantages of simple structure, higher quality and sensitivity, and lower environmental interference, and has the potential for utilization in multi-site temperature testing or multi-parameter testing (temperature, pressure, gas) in high-temperature environments.
本文提出了一种基于互补开口环谐振器（CSRR）的新型无线无源基片集成波导（SIW）温度传感器，用于超高温应用。利用HFSS软件（美国宾夕法尼亚州卡农斯堡的ANSYS公司）建立温度传感器模型以优化其性能。该传感器可利用微波反向散射原理进行无线温度监测，采用坚固的高温共烧陶瓷（HTCC）作为恶劣环境下的基片。通过非接触式测量询问器天线的S（1,1）参数，对实验结果进行了验证。利用介电微扰法，传感器的谐振频率随温度升高而降低，当温度从25℃升高到1200℃时，谐振频率从2.5808 GHz变为2.35941 GHz。该传感器在25 - 400℃范围内的灵敏度为126.74 kHz/℃，在400 - 1200℃范围内的灵敏度为217.33 kHz/℃。本研究中描述的传感器具有结构简单、品质和灵敏度较高、环境干扰较小等优点，在高温环境下的多部位温度测试或多参数测试（温度、压力、气体）中具有应用潜力。
