Magara Hideyuki, Tomita Takeshi, Kondo Yukihito, Sato Takafumi, Akase Zentaro, Shindo Daisuke
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan.
Electron Optics Division, JEOL Ltd., Akishima 196-8558, Japan.
Microscopy (Oxf). 2018 Apr 1;67(2):121-124. doi: 10.1093/jmicro/dfx126.
A secondary electron (SE) energy analyzer was developed for a transmission electron microscope. The analyzer comprises a microchannel plate (MCP) for detecting electrons, a coil for collecting SEs emitted from the specimen, a tube for reducing the number of backscattered electrons incident on the MCP, and a retarding mesh for selecting the energy of SEs incident on the MCP. The detection of the SEs associated with charging phenomena around a charged specimen was attempted by performing electron holography and SE spectroscopy using the energy analyzer. The results suggest that it is possible to obtain the energy spectra of SEs using the analyzer and the charging states of a specimen by electron holography simultaneously.
为透射电子显微镜开发了一种二次电子（SE）能量分析仪。该分析仪包括用于检测电子的微通道板（MCP）、用于收集从样品发射的二次电子的线圈、用于减少入射到MCP上的背散射电子数量的管以及用于选择入射到MCP上的二次电子能量的减速网。通过使用能量分析仪进行电子全息术和二次电子能谱分析，尝试检测带电样品周围与充电现象相关的二次电子。结果表明，使用该分析仪可以同时获得二次电子的能谱和通过电子全息术获得的样品的充电状态。
