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表皮微观结构启发的具有随机分布棘突的石墨烯压力传感器,具有高灵敏度和大线性度。

Epidermis Microstructure Inspired Graphene Pressure Sensor with Random Distributed Spinosum for High Sensitivity and Large Linearity.

机构信息

Institute of Microelectronics , Tsinghua University , Beijing , 100084 , China.

Department of Chemistry and Center for Nano and Micro Mechanics (CNMM) , Tsinghua University , Beijing , 100084 , China.

出版信息

ACS Nano. 2018 Mar 27;12(3):2346-2354. doi: 10.1021/acsnano.7b07613. Epub 2018 Feb 5.

Abstract

Recently, wearable pressure sensors have attracted tremendous attention because of their potential applications in monitoring physiological signals for human healthcare. Sensitivity and linearity are the two most essential parameters for pressure sensors. Although various designed micro/nanostructure morphologies have been introduced, the trade-off between sensitivity and linearity has not been well balanced. Human skin, which contains force receptors in a reticular layer, has a high sensitivity even for large external stimuli. Herein, inspired by the skin epidermis with high-performance force sensing, we have proposed a special surface morphology with spinosum microstructure of random distribution via the combination of an abrasive paper template and reduced graphene oxide. The sensitivity of the graphene pressure sensor with random distribution spinosum (RDS) microstructure is as high as 25.1 kPa in a wide linearity range of 0-2.6 kPa. Our pressure sensor exhibits superior comprehensive properties compared with previous surface-modified pressure sensors. According to simulation and mechanism analyses, the spinosum microstructure and random distribution contribute to the high sensitivity and large linearity range, respectively. In addition, the pressure sensor shows promising potential in detecting human physiological signals, such as heartbeat, respiration, phonation, and human motions of a pushup, arm bending, and walking. The wearable pressure sensor array was further used to detect gait states of supination, neutral, and pronation. The RDS microstructure provides an alternative strategy to improve the performance of pressure sensors and extend their potential applications in monitoring human activities.

摘要

最近,可穿戴压力传感器因其在监测人体健康生理信号方面的潜在应用而引起了极大的关注。灵敏度和线性度是压力传感器的两个最重要的参数。尽管已经引入了各种设计的微/纳米结构形态,但灵敏度和线性度之间的权衡尚未得到很好的平衡。人类皮肤在网状层中包含力感受器,即使受到外部大刺激,其灵敏度也很高。受具有高性能力感应的表皮启发,我们通过结合砂纸模板和还原氧化石墨烯,提出了一种具有随机分布棘突微结构的特殊表面形态。具有随机分布棘突(RDS)微结构的石墨烯压力传感器的灵敏度在 0-2.6 kPa 的宽线性范围内高达 25.1 kPa。与以前的表面改性压力传感器相比,我们的压力传感器具有优异的综合性能。根据模拟和机理分析,棘突微结构和随机分布分别有助于提高灵敏度和扩大线性范围。此外,该压力传感器在检测人体生理信号(如心跳、呼吸、发声和俯卧撑、手臂弯曲和行走等人体动作)方面显示出了很好的应用潜力。可穿戴压力传感器阵列还进一步用于检测旋前、中立和旋后步态状态。RDS 微结构提供了一种提高压力传感器性能的替代策略,并扩展了其在监测人体活动方面的潜在应用。

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