石墨烯微机电系统和纳机电系统。

Graphene MEMS and NEMS.

作者信息

Fan Xuge, He Chang, Ding Jie, Gao Qiang, Ma Hongliang, Lemme Max C, Zhang Wendong

机构信息

Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, 100081, Beijing, China.

Center for Interdisciplinary Science of Optical Quantum and NEMS Integration, School of Physics, Beijing Institute of Technology, 100081, Beijing, China.

出版信息

Microsyst Nanoeng. 2024 Oct 28;10(1):154. doi: 10.1038/s41378-024-00791-5.

DOI:10.1038/s41378-024-00791-5

PMID:39468030

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11519522/

Abstract

Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS, and sensor applications.

摘要

由于石墨烯具有原子级厚度、极高的载流子迁移率、高机械强度以及压阻式机电转换特性，它在微机电系统（MEMS）和纳机电系统（分别为MEMS和NEMS）中作为一种有趣的传感膜被越来越多地使用。基于石墨烯的NEMS器件具有更高的灵敏度、更小的尺寸和新的功能。在这篇综述中，我们讨论了石墨烯作为MEMS和NEMS功能材料的优点、石墨烯的相关特性、石墨烯MEMS和NEMS的转换机制、将石墨烯与MEMS衬底集成的典型转移方法、制造悬浮石墨烯的方法以及石墨烯图案化和电接触。因此，我们概述了基于悬浮和非悬浮石墨烯结构的器件。最后，我们讨论了石墨烯在MEMS和NEMS应用中的潜力和挑战。由于其独特的特性，石墨烯是新兴MEMS、NEMS和传感器应用的一种有前途的材料。