Yin Zhifu, Zou Helin, Sun Lei
1School of Mechanical Science and Engineering, Jilin University, Changchun 130012, China.
Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian 116024, China.
J Nanosci Nanotechnol. 2018 Apr 1;18(4):2530-2535. doi: 10.1166/jnn.2018.14341.
Nanofluidic devices are becoming increasingly critical for medical, chemical and biological applications. In this paper, a 2D Polycarbonate (PC) nanofluidic chip was fabricated by hot embossing and thermal bonding method. In this paper, the effect of the hot embossing parameters on the replication precision of 2D PC nanochannels was investigated by finite element method. To increase the bonding rate of the chip, the parameters of the thermal bonding process were optimized. Under the optimized parameters the 2D PC nanofluidic chip was successfully fabricated. The results show that the replication precision of the nanochannels can be as high as 97% and the bonding rate of the chip can be 96%. The fluorescent images demonstrate that there is no block and leakage through the whole microchannels and nanochannels. It is expected that this fabrication method has great potential to fabricate 2D nanofluidic chip with low cost and high precision.
纳米流体装置在医学、化学和生物应用中变得越来越重要。本文采用热压印和热键合方法制备了二维聚碳酸酯（PC）纳米流体芯片。本文通过有限元方法研究了热压印参数对二维PC纳米通道复制精度的影响。为了提高芯片的键合率，对热键合工艺参数进行了优化。在优化参数下成功制备了二维PC纳米流体芯片。结果表明，纳米通道的复制精度可达97%，芯片的键合率可达96%。荧光图像表明，整个微通道和纳米通道没有堵塞和泄漏。预计这种制造方法在低成本、高精度制造二维纳米流体芯片方面具有巨大潜力。
