Abgrall Patrick, Low Lee-Ngo, Nguyen Nam-Trung
Singapore-MIT Alliance, Nanyang Technological University, 50 Nanyang Avenue, Singapore.
Lab Chip. 2007 Apr;7(4):520-2. doi: 10.1039/b616134k. Epub 2007 Jan 11.
Planar nanochannels are of particular significance in nanofluidics: keeping the width on the micrometre scale prevents the use of nanolithography while the depth stays in the nanometric range, i.e. below 100 nm. Fabrication of wide and shallow nanochannels in a plastic is known to be challenging due to the collapse of the structure during the sealing step. In this Technical Note, we demonstrate the simple and low-cost fabrication without nanolithography of monolithic and planar nanochannels by hot-embossing and bonding below the glass transition temperature.
将宽度保持在微米尺度可避免使用纳米光刻技术，而深度则保持在纳米范围内，即低于100纳米。由于在密封步骤中结构会坍塌，因此在塑料中制造宽而浅的纳米通道具有挑战性。在本技术说明中，我们展示了通过在玻璃化转变温度以下进行热压印和键合，无需纳米光刻即可简单且低成本地制造整体式平面纳米通道。
