Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology , Dalian 116024, China.
Biomicrofluidics. 2014 Nov 25;8(6):066503. doi: 10.1063/1.4902945. eCollection 2014 Nov.
We present in this paper a method for obtaining a low cost and high replication precision 2D (two dimensional) nanofluidic chip with a PET (polyethylene terephthalate) sheet, which uses hot embossing and a thermal bonding technique. The hot embossing process parameters were optimized by both experiments and the finite element method to improve the replication precision of the 2D nanochannels. With the optimized process parameters, 174.67 ± 4.51 nm wide and 179.00 ± 4.00 nm deep nanochannels were successfully replicated into the PET sheet with high replication precision of 98.4%. O2 plasma treatment was carried out before the bonding process to decrease the dimension loss and improve the bonding strength of the 2D nanofluidic chip. The bonding parameters were optimized by bonding rate of the nanofluidic chip. The experiment results show that the bonding strength of the 2D PET nanofluidic chip is 0.664 MPa, and the total dimension loss of 2D nanochannels is 4.34 ± 7.03 nm and 18.33 ± 9.52 nm, in width and depth, respectively. The fluorescence images demonstrate that there is no blocking or leakage over the entire micro- and nanochannels. With this fabrication technology, low cost polymer nanochannels can be fabricated, which allows for commercial manufacturing of nano-components.
我们在本文中提出了一种使用聚对苯二甲酸乙二醇酯（PET）片通过热压印和热键合技术获得低成本和高精度二维（2D）纳流控芯片的方法。通过实验和有限元方法优化了热压印工艺参数，以提高 2D 纳米通道的复制精度。使用优化的工艺参数，成功地在 PET 片上复制了宽度为 174.67 ± 4.51nm、深度为 179.00 ± 4.00nm 的高精度纳米通道，复制精度高达 98.4%。在键合工艺之前进行 O2 等离子体处理，以减少尺寸损失并提高 2D 纳流控芯片的键合强度。通过纳流控芯片的键合速率优化了键合参数。实验结果表明，2D PET 纳流控芯片的键合强度为 0.664MPa，2D 纳米通道的总尺寸损失分别为 4.34 ± 7.03nm 和 18.33 ± 9.52nm，宽度和深度方向。荧光图像表明整个微纳通道没有堵塞或泄漏。通过这种制造技术，可以制造低成本的聚合物纳米通道，从而实现纳米组件的商业化制造。
